Table 6-3 Micromirror Array Optical
Characteristics
PARAMETER |
MIN |
NOM |
MAX |
UNIT |
Mirror Tilt angle,
variation device to device(1)(2)
(3)(4) |
15.6 |
17.0 |
18.4 |
degrees |
Number of
out-of-specification micromirrors (5) |
Adjacent micromirrors |
|
|
0 |
micromirrors |
Non-Adjacent micromirrors |
|
|
10 |
DMD Efficiency (420
nm
–
680 nm) |
|
|
68
|
%
|
(1) Measured relative to the plane formed by the overall micromirror array
(2) Variation can occur between any two individual
micromirrors
located on the same device or located on different devices
(3) Additional variation exists between the micromirror array and the package
datums. See the package drawing.
(5) An out-of-specification micromirror is defined as a micromirror that is unable to transition between the two landed states.